BMU-NIR800 Inspection Microscope with Near Infra-Red Wavelength

Industrial Microscope for Inspection Application
Using Near-Infrared (NIR) and Infra-red (IR) cameras and/or lights
With 4-, 6-, 8- or 12-inch mechanical XY stage
From 5x to 100x Plan Apo Objective lenses
High Resolution images that you can imagine

Introduction BMU-NIR800/NIR1200 Semiconductor FPD Inspection Microscope

Featuring various size of wafer holders, accommodating sizes such as 4-, 6-, 8-, and 12-inches, the BMU-NIR-800/NIR-1200 is specifically designed for proficient wafer and flat panel display detection. It provides extensive support for wafers with a diameter of up to 300mm / 12-in and flat panel displays of up to 17 inches / 430mm. The upgraded ergonomic design enhances user comfort, flexibility, and operational efficiency.

Application fields

Supporting for bright field, dark field, optional polarizing and DIC Nomarski imaging modes, BMU-NIR800 is widely used for inspection and quality control of semiconductor, FPD, circuit package, PCB, materials, casting metals, ceramic parts, abrasive tools and so on.

Features

Industrial Microscope for Inspection Application
Using Near-Infrared (NIR) and Infra-red (IR) cameras and/or lights
from 4x to 100x Plan Apo Objective lenses
High Resolution images that you have

BMU-NIR800 Inspection Microscope with Near Infra-Red Wavelength

Tilting viewing head

A tilting viewing head with an adjustable range of 0 to 35 degrees allows users to customize the height of the eye point, offering an optimal viewing angle tailored to individual preferences. This feature alleviates fatigue during prolonged operation and markedly enhances overall work efficiency.

Convenient and stable stage

The system operates on a Stage Clutch driven mechanism, facilitating swift movement with an upward button press and cancellation by pressing downward. This feature is designed to alleviate fatigue during prolonged usage. The stage, equipped with a linear guide rail, enables effortless and smooth motion.

Safe and high speed electric nosepiece

Utilizing forward and backward buttons for seamless switching, the magnification conversion is rapid and orientation repetition is accurate. The mechanical switch mode employed significantly extends the service life of the nosepiece.

Front operating buttons

BMU-NIR800 adopts electric control for nosepiece and aperture diaphragm, with control buttons in front, is easy and convenient for operation, improve the working efficiency.

Shockproof frame

Featuring six height-adjustable feet, the metal frame of the BMU-NIR800 microscope offers easy alignment, superior stability, and effective shock resistance to ensure the stabilization of images.

Specfications

1) Objective Lenses

Name	Magnification	NA	WD	Si
Flat-Field Semi-Apochromatic Infrared Objective	5X	0.15	19.5mm	/
	10X	0.3	12.2mm	/
	20X	0.45	7.31-7.57mm	0-1.2mm
	50X	0.7	2.68-2.93mm	0-1.2mm

2) OptoMechanics

Feature	BMU-NIR800	BMU-NIR1200
Mode	Bright field / Near-infrared	Bright field / Near-infrared
Optical System	Infinity color corrected optical system	Infinity color corrected optical system
Observation	Bright filed / Near-infrared	Bright filed / Near-infrared
Viewing Head	Near-infrared 30°tilting trinocular head (Erect image), interpupillary distance: 50-76mm, splitting ratio: 100:0 or 0:100	High eye point wide field plan eyepiece PL10X/22mm, diopter adjustable,can be equipped with micrometer
Eyepiece	High eye point wide field plan eyepiece PL10X/23mm, diopter adjustable	High eye point wide field plan eyepiece PL10X/23mm, diopter adjustable
Nosepiece	Motorized sextuple nosepiece with DIC slot	Motorized sextuple nosepiece with DIC slot
Frame	Reflected frame with low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm.With upper limit and tension adjustment. Built-in 100-240V wide voltage system	6 inches three-layer mechanical stage with low position coaxial adjustment; size: 445mm x 240mm, moving range for reflected: 158mmx158mm; moving range for transmitted: 100x100mm; with clutch handle for quick movement, metal plate for reflected use; rotary stage/6 inch wafer disc, suitable for 4-, 5-, 6-inch wafers
Illumination	NIR reflective illuminator, with a switch for changing bright field and NIR; with variable electric aperture diaphragm, center is adjustable; With color filter slot; 12V 100W halogen light	NIR reflective illuminator, with a switch for changing bright field and NIR; with variable electric aperture diaphragm, center is adjustable; With color filter slot; 12V 100W halogen light
Filter	Band-pass filter (1100nm, 1200nm, 1300nm)	Band-pass filter (1100nm, 1200nm, 1300nm)
Camera	1.3 megapixel NIR camera (400-1700nm), monochrome camera, frame rate 125fps@1280×1024, pixel size 5µm	3.2 megapixel NIR camera (400-1100nm) monochrome camera, frame rate 120fps@2064×1544, pixel size 3.45µm
Camera Adapter	0.35X /0.5X / 0.65X/ 1X C-mount adapter	0.35X /0.5X / 0.65X/ 1X C-mount adapter
Others	High precision micrometer; PC; software with image processing, image acquisition, image management, measurement functions	High precision micrometer; PC; software with image processing, image acquisition, image management, measurement functions

3) Camera

Sample Images


Imaging without correction collar objective	Imaging with correction collar objective

Before and after NIR reflection images

Images at 1100nm, 1200nm and 1300nm wavelengths

Configuration

Objective lenses:

BF: 2x, 2.5x, 4x, 5x, 10x, 20x, 40x, 50x, 60x, 80x, 100x, 150x, 200x
DF: 5x, 10x, 20x, 40x, 50x, 60x, 80x, 100x
Plan, Plan Apo or Plan S APp Objective lenses

Camera:

Standard IR Camera (400-1100nm)
InGaAs Camera (400-1700nm)

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BMU-NIR800 Inspection Microscope with Near Infra-Red Wavelength