| No. | Item | Description | Comments |
| 1 | Stage | 550(W)x550(D)mm | |
| 2 | Stroke | 600(X)x400(Y)mm | |
| 3 | X/Y Type | X/Y-Axis : Manual | |
| 4 | Z Type | Z-Axis : Motorizing | 30mm Stroke |
| 5 | Observation method | BF/DF/POL/DIC | Optional; BF Included |
| 6 | Frame | Reflected/Transmitted Frame | |
| 7 | Degree of precision | 5x, 10x, 20x, 50x, 100x | Plan Semi Apochromat Objective lens |
| 8 | 3D Profile | Possible | Optional |
| 9 | Table | Anti-vibration Table | |
| 10 | Others | XYZ Motion Controller | speed-control possibility |
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