No. | Item | Description | Comments |
 1 |  Stage |  550(W)x550(D)mm | |
 2 |  Stroke |  600(X)x400(Y)mm | |
 3 |  X/Y Type |  X/Y-Axis : Manual | |
 4 |  Z Type |  Z-Axis : Motorizing |  30mm Stroke |
5 | Â Observation method | BF/DF/POL/DIC | Optional;Â BF Included |
6 | Frame | Reflected/Transmitted Frame | |
7 | Degree of precision | 5x, 10x, 20x, 50x, 100x | Plan Semi Apochromat Objective lens |
8 |   3D Profile |  Possible |  Optional |
 9 | Table | Anti-vibration Table | |
 10 | Others | XYZ Motion Controller | speed-control possibility |
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