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|  No. | Item | Description | Comments |
| Â 1 | Â Stage | Â 550(W)x550(D)mm | |
| Â 2 | Â Stroke | Â 600(X)x400(Y)mm | |
| Â 3 | Â X/Y Type | Â X/Y-Axis : Manual | |
| Â 4 | Â Z Type | Â Z-Axis : Motorizing | Â 30mm Stroke |
| 5 | Â Observation method | BF/DF/POL/DIC | Optional;Â BF Included |
| 6 | Frame | Reflected/Transmitted Frame | |
| 7 | Degree of precision | 5x, 10x, 20x, 50x, 100x | Plan Semi Apochromat Objective lens |
| 8 |   3D Profile |  Possible |  Optional |
| Â 9 | Table | Anti-vibration Table | |
| Â 10 | Others | XYZ Motion Controller | speed-control possibility |
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