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Bio-3D-PW1 Nano 3D Optical Surface Profilometers

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The Bio-3D-PW1 Nano 3D Optical Surface Profilometer is an advanced instrument designed for the precise measurement and analysis of surface roughness and profiles in high-precision components across various industries, including semiconductor, 3C electronics, ultraprecise machining, optical machining, micro-nano materials, and micro-electro-mechanical systems (MEMS).

This profilometer is capable of detailed measurement and analysis of surface characteristics for a wide range of products, components, and materials. It accurately assesses surface form and profile features such as flatness, roughness, waviness, appearance, surface defects, abrasion, corrosion, gaps, holes, steps, curvature, and deformation.

Examples of its application include the measurement of sapphire crystals in 3C electronics and ink screens, ensuring the highest standards of surface quality and precision.

Bio-3D-PW1 Nano 3D Optical Surface Profilometers

Product Name: Bio-3D-PW1 Nano 3D Optical Surface Profilometer
Standard Field of View: 0.98 x 0.98 mm
Maximum Field of View: 6 x 6 mm
Reflectivity of Test Object: 0.05% to 100%
Roughness RMS Repeatability: 0.01 nm
Scanning Range: ≤ 10 mm
Resolution: 0.1 nm
Stage Measurement Accuracy: 0.3%
Stage Measurement Repeatability: 0.08% (1σ)

Model No.*1 Bio-3D-PW1 Bio-3D-PW1-Pro W1-Ultra Bio-3D-PW11-Lite Model No.*2 Bio-3D-PW2 Bio-3D-PW2-Pro W2-Ultra Bio-3D-PW2-Lite
Light source White LED Light source White LED
Video system 1024×1024 Video system 1024×1025
Objective Lens Standard: 10X(Optional: 2.5X, 5X, 20X, 50X, 100X) Objective Lens Standard: 10X(Optional: 2.5X, 5X, 20X, 50X, 100X)
Optical Zoom Standard: 0.5X Standard: 0.5X Optical Zoom Standard: 0.5X Standard: 0.5X
Optional: 0.375X, 0.75X,1X Optional: 0.375X, 0.75X Optional: 0.375X, 0.75X,1X Optional: 0.375X, 0.75X
Standard Field of View 0.98×0.98 mm Standard Field of View 0.98×0.98 mm
Lens Turret Standard:  Manual 3 holes turret(Optional:  Motorized 5 holes turret) Lens Turret Standard:  Manual 3 holes turret(Optional:  Motorized 5 holes turret)
XY Object table Size 320×200mm 300×300mm 320x200mm 220x220mm XY Object table Size 320×200mm 300×300mm 320x200mm 220x220mm
Moving range 140×100mm 200×200mm 140x100mm 100x100mm Moving range 140×100mm 200×200mm 140x100mm 100x100mm
Loading capacity 10kg Loading capacity 10kg
Control method Motorized Control method Motorized
Tilt ±5° ±3° Tilt ±5° ±3°
Z Axis focusing Travel range 100mm 50mm Z Axis focusing Travel range 100mm 50mm
Control method Motorized Control method Motorized
Z Stroke Scanning Range 10mm Z Stroke Scanning Range 10mm
Surface Form Repeatability*2 0.1nm Surface Form Repeatability*3 0.1nm
Roughness RMS Repeatability*3 0.005nm Roughness RMS Repeatability*4 0.005nm
Step Height Measurementy*4 Accuracy: 0.3%; Repeatability: 0.08%(1σ) Accuracy: 0.5% Step Height Measurementy*5 Accuracy: 0.3%; Repeatability: 0.08%(1σ) Accuracy: 0.5%
Repeatability: 0.1%(1σ) Repeatability: 0.1%(1σ)
Scanning Speed @ 0.1nm resolution 1.85μm/s 1.85μm/s 8μm/s 1.85μm/s Scanning Speed @ 0.1nm resolution 1.85μm/s 1.85μm/s 8μm/s 1.85μm/s
Reflectivity of Test object 0.05% ~100% Reflectivity of Test object 0.05% ~100%
Weight <160KG 50kg Weight <160KG 50kg
Size(L*W*H) 700x606x920mm 440x660x700mm Size(L*W*H) 700x606x920mm 440x660x700mm
Stage measurement Temperature 15°C~30°C, fuctuation <1°C/15min Stage measurement Temperature 15°C~30°C, fuctuation <1°C/15min
Humidity  5%~95% RH, no condensation Humidity  5%~95% RH, no condensation
Vibration VC-C or better Vibration VC-C or better
Software 3σ≤4nm Software 3σ≤4nm
Noise Evaluation*5 Noise Evaluation*6
Compressed Air 0.6Mpa oil-free, water-free, 6mm diameter of hose Compressed Air 0.6Mpa oil-free, water-free, 6mm diameter of hose
Power Supply AC100~240V, 50/60Hz, 4A, 300W Power Supply AC100~240V, 50/60Hz, 4A, 300W
Other No strong magnetic field, No corrosive gas Other No strong magnetic field, No corrosive gas
*1 W1 is the standard model of 3D Optical Surface Profilometer; W1-pro has larger stage size and travel range.
W1-Ultra has greatly improved the scanning speed compared to W1.
*2 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view
*3 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178.
*4 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000
*5 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

 

 

Standard Parameters
ISO 4287-1997 P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters:

Standard Parameters
ISO 4287-1997 P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters:

Standard Parameters
ISO 25178 Height Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function Smr,Smc,S×p
Space Sal,Str,Std
Composite parameters Sdq,Sdr
Volume Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space Str,Std,Sal
Composite parameters Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume Smr,Sdc
Function Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional Sbi,Sci,Svi
EUR 16145 EN Amplitude SaSq,Sy,Sz,Ssk,Sku
Mixed parameters Ssc,Sdq
Functional Sbi,Sci
Space Sdsrw
Hardness Hs,Hvol
ASME B46.1 3D St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

 

The Bio-3D-PW1 Optical 3D Surface Profilometer is a cutting-edge instrument designed for sub-nanometer measurement of precision components. Utilizing white light interference technology, along with a precise Z-direction scanning module and advanced 3D modeling algorithms, it performs non-contact scanning of an object’s surface to generate a detailed 3D image. The XtremeVision software then processes and analyzes this 3D image, extracting a comprehensive set of 2D and 3D parameters that reflect the surface quality of the object. The Bio-3D-PW1 is a user-friendly, high-precision optical instrument equipped with robust analysis capabilities, making it ideal for evaluating various surface form and roughness parameters. Its unique light source enables the measurement of both smooth and rough surfaces across a wide range of precision parts.

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